MC 4: microLED Electro-Optical Inspection and Metrology

In this MasterClass, Dr. Tali Hurvitz, InZiv VP of R&D, will present an overview of the key challenges in today’s electro-optical inspection and metrology of microLEDs. The talk will explore the wide diversity in microLED chip designs, including variations in size and geometry of the LED chip and contact pads, wavelength, optical power, luminance, and other properties, and the implications for accurate and high throughput inspection and metrology. Special focus will be placed on the question of electroluminescence (EL) vs. photoluminescence (PL), and the critical information obtained via the study and comparison of IV curves in determining LED health on a per-chip basis. Other topics covered in this analysis include the unique contribution of high-resolution nano-EL and nano-PL measurements, the importance of testing for External Quantum Efficiency (EQE), and the role of angular measurements in fully assessing microLED functionality.